Inventor
NAKAIZUMI YASUSHI
JP6 patents
Patents
6 patentsUS5081353AJan 14, 1992
Combined scanning electron and scanning tunnelling microscope apparatus and method
HITACHI LTD65 citations95
US4658136AApr 14, 1987
Secondary electron detecting apparatus
HITACHI LTD30 citations91
US5393977AFeb 28, 1995
Charged particle beam apparatus and it's operating method
HITACHI LTD14 citations73
US5256876AOct 26, 1993
Scanning tunnel microscope equipped with scanning electron microscope
HITACHI LTD12 citations73
US4059783ANov 22, 1977
Field emission apparatus
HITACHI LTD7 citations72
US6031235AFeb 29, 2000
Ultra-high vacuum apparatus
HITACHI LTD11 citations69