Inventor

HUANG YOUNGZHANG

US2 patents

Patents

2 patents

US7022984B1Apr 4, 2006

Biased electrostatic deflector

AXCELIS TECH INC43 citations90

US6949895B2Sep 27, 2005

Unipolar electrostatic quadrupole lens and switching methods for charged beam transport

AXCELIS TECH INC24 citations89