Inventor

ARIGA YOSHIKAZU

JP3 patents

Patents

3 patents

US7155963B2Jan 2, 2007

Cleaning evaluation method for a substrate

EBARA CORP6 citations57

US7077730B2Jul 18, 2006

Method and apparatus for polishing a workpiece

EBARA CORP0 citations48

US7264681B2Sep 4, 2007

Cleaning apparatus and cleaning method

EBARA CORP0 citations45