P

Inventor

YAP CHIEW WAH

SG6 patents
⚠️ This page may combine multiple inventors who share the name “YAP CHIEW WAH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHARTERED SEMICONDUCTOR MFG

3 patents
US6294480B1Sep 25, 2001

Method for forming an L-shaped spacer with a disposable organic top coating

CHARTERED SEMICONDUCTOR MFG24 citations91
US6521539B1Feb 18, 2003

Selective etch method for selectively etching a multi-layer stack layer

CHARTERED SEMICONDUCTOR MFG17 citations80
US6632745B1Oct 14, 2003

Method of forming almost L-shaped spacer for improved ILD gap fill

CHARTERED SEMICONDUCTOR MFG20 citations78

TOKYO ELECTRON LTD

1 patent
US11501976B2Nov 15, 2022

Substrate processing method and substrate processing apparatus

TOKYO ELECTRON LTD2 citations66

GLOBALFOUNDRIES SG PTE LTD

1 patent
US10566441B2Feb 18, 2020

Methods of forming integrated circuits with solutions to interlayer dielectric void formation between gate structures

GLOBALFOUNDRIES SG PTE LTD0 citations34

NAGARAD SRIPAD SHESHAGIRI

1 patent
US8283263B2Oct 9, 2012

Integrated circuit system including nitride layer technology

NAGARAD SRIPAD SHESHAGIRI0 citations28