Inventor

Dhagat Parul

US2 patents

Patents

2 patents

US10146036B2Dec 4, 2018

Semiconductor wafer inspection using care area group-specific threshold settings for detecting defects

GLOBALFOUNDRIES INC1 citations45

US9741581B2Aug 22, 2017

Using tensile mask to minimize buckling in substrate

GLOBALFOUNDRIES INC0 citations43