Inventor

ERIGUCHI KOJI

JP26 patents

⚠️ This page may combine multiple inventors who share the name “ERIGUCHI KOJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ERIGUCHI KOJI

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD

Method of manufacturing aggregate of semiconductor micro-needles

Method of monitoring deposit in chamber, method of plasma processing, method of dry-cleaning chamber, and semiconductor manufacturing apparatus

MIS device, method of manufacturing the same, and method of diagnosing the same

Apparatus and method for optical evaluation, apparatus and method for manufacturing semiconductor device, method of controlling apparatus for manufacturing semiconductor device, and semiconductor device

Aggregate of semiconductor micro-needles and method of manufacturing the same, and semiconductor apparatus and method of manufacturing the same

Semiconductor manufacturing apparatus

Method of presuming life time of semiconductor device

Method of forming a high dielectric constant insulating film and method of producing semiconductor device using the same

Device for manufacturing semiconductor device and method of manufacturing the same

Method of making aggregate of semiconductor micro-needles

Apparatus and method for optical evaluation, apparatus and method for manufacturing semiconductor device, method of controlling apparatus for manufacturing semiconductor device, and semiconductor device

Apparatus and method for optical evaluation, apparatus and method for manufacturing semiconductor device, method of controlling apparatus for manufacturing semiconductor device, and semiconductor device

Device for manufacturing semiconductor device and method of manufacturing the same

Aggregate of semiconductor micro-needles and method of manufacturing the same, and semiconductor apparatus and method of manufacturing the same

Device for manufacturing semiconductor device and method of manufacturing the same

Aggregate of semiconductor micro-needles and method of manufacturing the same, and semiconductor apparatus and method of manufacturing the same

Method and apparatus for semiconductor device fabrication

Method and apparatus for semiconductor device fabrication

Method for examining semiconductor substrate, and method for controlling fabrication process of semiconductor devices

Method for making a semiconductor device

Method and apparatus for evaluating insulating film

Semiconductor device with dummy conductors

Semiconductor device

Apparatus and method for optical evaluation, apparatus and method for manufacturing semiconductor device, method of controlling apparatus for manufacturing semiconductor device, and semiconductor device

Method and apparatus for evaluating insulating film

SONY SEMICONDUCTOR SOLUTIONS CORP

Defect density calculation method, defect-density calculation program, defect-density calculation apparatus, heat treatment control system and machining control system