Inventor

BREUKERS MARCUS JOSEPH ELISABE

NL2 patents

Patents

2 patents

US7148950B2Dec 12, 2006

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV2 citations57

US7352436B2Apr 1, 2008

Lithographic apparatus, projection apparatus and device manufacturing method

ASML NETHERLANDS BV0 citations35