Inventor
RZEPIELA JEFFREY A
US3 patents
Patents
3 patentsUS7893703B2Feb 22, 2011
Systems and methods for controlling deposition of a charge on a wafer for measurement of one or more electrical properties of the wafer
KLA TENCOR TECH CORP104 citations96
US7110238B1Sep 19, 2006
Systems and methods for using non-contact voltage sensors and corona discharge guns
KLA TENCOR TECH CORP11 citations81
US6909291B1Jun 21, 2005
Systems and methods for using non-contact voltage sensors and corona discharge guns
KLA TENCOR TECH CORP9 citations70