Inventor
LAMBREGTS CORNELIS JOHANNES HENRICUS
NL4 patents
Patents
4 patentsUS11448973B2Sep 20, 2022
Computational metrology based correction and control
ASML NETHERLANDS BV2 citations68
US11372338B2Jun 28, 2022
Method for evaluating control strategies in a semiconductor manufacturing process
ASML NETHERLANDS BV1 citations49
US11709434B2Jul 25, 2023
Device manufacturing method
ASML NETHERLANDS BV0 citations46
US12276919B2Apr 15, 2025
Method for controlling a semiconductor manufacturing process
ASML NETHERLANDS BV0 citations44