Inventor
OWCZARZ ALEKSANDAR
US3 patents
Patents
3 patentsUS6676493B1Jan 13, 2004
Integrated planarization and clean wafer processing system
LAM RES CORP13 citations81
US6767428B1Jul 27, 2004
Method and apparatus for chemical mechanical planarization
LAM RES CORP8 citations71
US7033250B2Apr 25, 2006
Method for chemical mechanical planarization
LAM RES CORP4 citations60