Inventor
KISTLER ROD
US10 patents
Patents
10 patentsUS6340326B1Jan 22, 2002
System and method for controlled polishing and planarization of semiconductor wafers
LAM RES CORP48 citations95
US6705930B2Mar 16, 2004
System and method for polishing and planarizing semiconductor wafers using reduced surface area polishing pads and variable partial pad-wafer overlapping techniques
LAM RES CORP23 citations92
US6607425B1Aug 19, 2003
Pressurized membrane platen design for improving performance in CMP applications
LAM RES CORP31 citations90
US6869337B2Mar 22, 2005
System and method for polishing and planarizing semiconductor wafers using reduced surface area polishing pads and variable partial pad-wafer overlapping techniques
LAM RES CORP14 citations84
US6808442B1Oct 26, 2004
Apparatus for removal/remaining thickness profile manipulation
LAM RES CORP12 citations74
US6913521B2Jul 5, 2005
Methods using active retainer rings for improving edge performance in CMP applications
LAM RES CORP5 citations71
US6776695B2Aug 17, 2004
Platen design for improving edge performance in CMP applications
LAM RES CORP11 citations71
US6767428B1Jul 27, 2004
Method and apparatus for chemical mechanical planarization
LAM RES CORP8 citations71
US6729943B2May 4, 2004
System and method for controlled polishing and planarization of semiconductor wafers
LAM RES CORP4 citations62
US7033250B2Apr 25, 2006
Method for chemical mechanical planarization
LAM RES CORP4 citations60