Inventor
VERNI GIUSEPPE ALESSIO
BE3 patents
Patents
3 patentsUS11286558B2Mar 29, 2022
Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film
ASM IP HOLDING BV9 citations83
US11827978B2Nov 28, 2023
Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film
ASM IP HOLDING BV0 citations60
US12031206B2Jul 9, 2024
Methods and systems for forming a layer comprising a transitional metal and a group 13 element
ASM IP HOLDING BV0 citations57