Inventor
WETZEL DAVID JOSEPH
US4 patents
Patents
4 patentsUS12198902B2Jan 14, 2025
Laminated aerosol deposition coating for aluminum components for plasma processing chambers
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US12129569B2Oct 29, 2024
Method for conditioning semiconductor processing chamber components
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US12249490B2Mar 11, 2025
Single crystal metal oxide plasma chamber component
LAM RES CORP0 citations55
US10725485B2Jul 28, 2020
System and method for calculating substrate support temperature
LAM RES CORP0 citations24