Inventor
D HEURLE FRANCOIS MAX
US3 patents
Patents
3 patentsUS5828131AOct 27, 1998
Low temperature formation of low resistivity titanium silicide
IBM60 citations94
US6187679B1Feb 13, 2001
Low temperature formation of low resistivity titanium silicide
IBM9 citations72
US5945737AAug 31, 1999
Thin film or solder ball including a metal and an oxide, nitride, or carbide precipitate of an expandable or contractible element
IBM5 citations72