Inventor
PATADIA NALIN
US4 patents
Patents
4 patentsUS6190037B1Feb 20, 2001
Non-intrusive, on-the-fly (OTF) temperature measurement and monitoring system
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US6146504ANov 14, 2000
Substrate support and lift apparatus and method
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US6315878B1Nov 13, 2001
Substrate support and lift apparatus and method
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US6030513AFeb 29, 2000
Full face mask for capacitance-voltage measurements
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