Inventor
CEMIC FRANZ
DE5 patents
Patents
5 patentsUS6879440B2Apr 12, 2005
Autofocus module and method for a microscope-based system
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US7271889B2Sep 18, 2007
Device and method for inspecting an object
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US6975409B2Dec 13, 2005
Illumination device; and coordinate measuring instrument having an illumination device
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US7209243B2Apr 24, 2007
Illumination device, and coordinate measuring instrument having an illumination device
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US6943901B2Sep 13, 2005
Critical dimension measuring instrument
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