Inventor
DANNER LAMBERT
DE14 patents
⚠️ This page may combine multiple inventors who share the name “DANNER LAMBERT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LEICA MICROSYSTEMS
8 patentsUS6600560B2Jul 29, 2003
Optical measurement arrangement having an ellipsometer
LEICA MICROSYSTEMS56 citations92
US6879440B2Apr 12, 2005
Autofocus module and method for a microscope-based system
LEICA MICROSYSTEMS27 citations90
US6624930B1Sep 23, 2003
Illumination device for a DUV microscope and DUV microscope
LEICA MICROSYSTEMS24 citations90
US7271889B2Sep 18, 2007
Device and method for inspecting an object
LEICA MICROSYSTEMS32 citations89
US6975409B2Dec 13, 2005
Illumination device; and coordinate measuring instrument having an illumination device
LEICA MICROSYSTEMS6 citations71
US6618154B2Sep 9, 2003
Optical measurement arrangement, in particular for layer thickness measurement
LEICA MICROSYSTEMS7 citations71
US7209243B2Apr 24, 2007
Illumination device, and coordinate measuring instrument having an illumination device
LEICA MICROSYSTEMS4 citations60
US6943901B2Sep 13, 2005
Critical dimension measuring instrument
LEICA MICROSYSTEMS0 citations50
VISTEC SEMICONDUCTOR SYS GMBH
3 patentsUS7420670B2Sep 2, 2008
Measuring instrument and method for operating a measuring instrument for optical inspection of an object
VISTEC SEMICONDUCTOR SYS GMBH10 citations83
US7268940B2Sep 11, 2007
Illuminating device
VISTEC SEMICONDUCTOR SYS GMBH5 citations62
US7561263B2Jul 14, 2009
Apparatus for illuminating and inspecting a surface
VISTEC SEMICONDUCTOR SYS GMBH0 citations40