Inventor
KIM Kyohyeok
KR6 patents
Patents
6 patentsUS11348760B2May 31, 2022
Plasma processing apparatus and method of manufacturing semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD2 citations70
US10892145B2Jan 12, 2021
Substrate processing apparatus, substrate processing method, and method of fabricating semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD1 citations61
US12211672B2Jan 28, 2025
Apparatus and method for plasma etching
SAMSUNG ELECTRONICS CO LTD0 citations55
US11984304B2May 14, 2024
Apparatus and method for plasma etching
SAMSUNG ELECTRONICS CO LTD0 citations55
US11515193B2Nov 29, 2022
Etching apparatus
SAMSUNG ELECTRONICS CO LTD0 citations48
US9812335B2Nov 7, 2017
Method of forming fine pattern of semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations39