Inventor
KISHIDA TAKENOBU
JP7 patents
Patents
7 patentsUS6963139B2Nov 8, 2005
Semiconductor device including a layer having a β-crystal structure
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD33 citations91
US6770977B2Aug 3, 2004
Semiconductor device and method for fabricating the same
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD14 citations82
US6951809B2Oct 4, 2005
Method for manufacturing semiconductor device
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD13 citations80
US7037371B1May 2, 2006
Method for fabricating semiconductor device
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD9 citations69
US7001841B2Feb 21, 2006
Production method of semiconductor device
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD4 citations59
US6746962B2Jun 8, 2004
Method for fabricating a semi-conductor device having a tungsten film-filled via hole
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD3 citations57
US7233073B2Jun 19, 2007
Semiconductor device and method for fabricating the same
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD1 citations50