Inventor

TAKESHITA YUTARO

JP2 patents

Patents

2 patents

US11597896B2Mar 7, 2023

Cleaning liquid, cleaning method, and method for producing semiconductor wafer

MITSUBISHI CHEM CORP0 citations59

US11149231B2Oct 19, 2021

Cleaning liquid, cleaning method, and method for producing semiconductor wafer

MITSUBISHI CHEM CORP0 citations53