Inventor
AKUTSU KOTARO
JP24 patents
Patents
24 patentsUS6028376AFeb 22, 2000
Positioning apparatus and exposure apparatus using the same
CANON KK114 citations98
US5858587AJan 12, 1999
Positioning system and method and apparatus for device manufacture
CANON KK94 citations97
US6359679B1Mar 19, 2002
Positioning device, exposure device, and device manufacturing method
CANON KK67 citations96
US6285444B1Sep 4, 2001
Positioning system and position measuring method for use in exposure apparatus
CANON KK82 citations96
US5939852AAug 17, 1999
Stage feeding device
CANON KK60 citations96
US5864389AJan 26, 1999
Stage apparatus and exposure apparatus and device producing method using the same
CANON KK56 citations96
US5184055AFeb 2, 1993
Device for positioning control
CANON KK84 citations96
US5726548AMar 10, 1998
Moving stage apparatus and system using the same
CANON KK64 citations95
US7038759B2May 2, 2006
Exposure apparatus
CANON KK22 citations92
US6008882ADec 28, 1999
Stage device, method of controlling same, and exposure apparatus using said stage device
CANON KK28 citations92
US5717482AFeb 10, 1998
Stage apparatus and method of mounting a substrate on a substrate holding surface of a substrate chuck in which a substrate is mounted in a Z-axis direction
CANON KK44 citations92
US5701041ADec 23, 1997
Weight supporting apparatus
CANON KK40 citations92
US5382095AJan 17, 1995
Static pressure bearing device
CANON KK23 citations92
US7057703B2Jun 6, 2006
Exposure apparatus
CANON KK11 citations84
US7030964B2Apr 18, 2006
Stage system, exposure apparatus, and device manufacturing method
CANON KK17 citations84
US6879382B2Apr 12, 2005
Substrate processing apparatus
CANON KK12 citations84
US7123350B2Oct 17, 2006
Substrate holding device, substrate processing apparatus using the same, and method for aligning and holding substrate
CANON KK7 citations74
US7057193B2Jun 6, 2006
Exposure apparatus
CANON KK7 citations74
US7012690B2Mar 14, 2006
Substrate processing apparatus
CANON KK5 citations74
US6989888B2Jan 24, 2006
Stage system, exposure apparatus, and device manufacturing method
CANON KK8 citations74
US5585627ADec 17, 1996
Apparatus for scanning original image having a plurality of mirrors of different natural frequencies
CANON KK14 citations73
US7207720B2Apr 24, 2007
Static gas bearing system, stage mechanism, exposure apparatus, and device manufacturing method
CANON KK8 citations72
US6930756B2Aug 16, 2005
Electron beam exposure apparatus and semiconductor device manufacturing method
CANON KK5 citations62
US7391496B2Jun 24, 2008
Exposure apparatus
CANON KK0 citations52