Inventor
PEEDIN LESTER R
US6 patents
⚠️ This page may combine multiple inventors who share the name “PEEDIN LESTER R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ENERGY CONVERSION DEVICES INC
5 patentsUS4883686ANov 28, 1989
Method for the high rate plasma deposition of high quality material
ENERGY CONVERSION DEVICES INC100 citations95
US5093149AMar 3, 1992
Method of depositing directly activated species onto a remotely located substrate
ENERGY CONVERSION DEVICES INC38 citations92
US5126635AJun 30, 1992
Microwave plasma operation using a high power microwave transmissive window assembly
ENERGY CONVERSION DEVICES INC28 citations91
US4937094AJun 26, 1990
Method of creating a high flux of activated species for reaction with a remotely located substrate
ENERGY CONVERSION DEVICES INC49 citations91
US4931756AJun 5, 1990
High power microwave transmissive window assembly
ENERGY CONVERSION DEVICES INC15 citations72