Inventor
ELLWANGER RUSSELL
US3 patents
Patents
3 patentsUS6296712B1Oct 2, 2001
Chemical vapor deposition hardware and process
APPLIED MATERIALS INC68 citations94
US7827930B2Nov 9, 2010
Apparatus for electroless deposition of metals onto semiconductor substrates
APPLIED MATERIALS INC17 citations82
US7323058B2Jan 29, 2008
Apparatus for electroless deposition of metals onto semiconductor substrates
APPLIED MATERIALS INC4 citations60