Inventor
CHEBOLI RAMAKRISHNA
US4 patents
Patents
4 patentsUS7497767B2Mar 3, 2009
Vibration damping during chemical mechanical polishing
APPLIED MATERIALS INC8 citations84
US6848980B2Feb 1, 2005
Vibration damping in a carrier head
APPLIED MATERIALS INC17 citations83
US7827930B2Nov 9, 2010
Apparatus for electroless deposition of metals onto semiconductor substrates
APPLIED MATERIALS INC17 citations82
US7323058B2Jan 29, 2008
Apparatus for electroless deposition of metals onto semiconductor substrates
APPLIED MATERIALS INC4 citations60