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Inventor
TSAI FENG-TSAI
TW
2 patents
Patents
2 patents
US8502328B2
Aug 6, 2013
Micro electronic mechanical system structure
NIEH TSAI-CHIANG
0 citations
35
US8163583B2
Apr 24, 2012
Manufacturing method of micro electronic mechanical system structure
NIEH TSAI-CHIANG
0 citations
35