Inventor

ITANI AKIRA

JP2 patents

Patents

2 patents

US5113402AMay 12, 1992

Solid state laser device for lithography light source and semiconductor lithography method

MITSUI PETROCHEMICAL IND11 citations67

US4886654ADec 12, 1989

Process for producing barium titanates

MITSUI PETROCHEMICAL IND16 citations65