Inventor
YADAV PUNEET
US12 patents
⚠️ This page may combine multiple inventors who share the name “YADAV PUNEET”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
5 patentsUS7078344B2Jul 18, 2006
Stress free etch processing in combination with a dynamic liquid meniscus
LAM RES CORP13 citations84
US6723574B1Apr 20, 2004
Method for quantifying uniformity patterns and including expert knowledge for tool development and control
LAM RES CORP9 citations72
US7653515B2Jan 26, 2010
Expert knowledge methods and systems for data analysis
LAM RES CORP3 citations62
US7295954B2Nov 13, 2007
Expert knowledge methods and systems for data analysis
LAM RES CORP3 citations62
US7130767B2Oct 31, 2006
Computer-implemented data presentation techniques for a plasma processing system
LAM RES CORP0 citations41
UNIV TENNESSEE RES FOUNDATION
3 patentsUS7769803B2Aug 3, 2010
Parallel data processing architecture
UNIV TENNESSEE RES FOUNDATION58 citations97
US7272612B2Sep 18, 2007
Method of partitioning data records
UNIV TENNESSEE RES FOUNDATION33 citations95
US7882106B2Feb 1, 2011
Method of indexed storage and retrieval of multidimensional information
UNIV TENNESSEE RES FOUNDATION11 citations92