Inventor

JIANG ANBEI

US4 patents

⚠️ This page may combine multiple inventors who share the name “JIANG ANBEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BAO LIYUAN

2 patents

US8691023B2Apr 8, 2014

Methods and apparatus for cleaning deposition chamber parts using selective spray etch

BAO LIYUAN116 citations92

US8398779B2Mar 19, 2013

Non destructive selective deposition removal of non-metallic deposits from aluminum containing substrates

BAO LIYUAN0 citations45

(unassigned)

1 patent

US6852242B2Feb 8, 2005

Cleaning of multicompositional etchant residues

25 citations85

APPLEID MATERIALS INC

1 patent

US7270761B2Sep 18, 2007

Fluorine free integrated process for etching aluminum including chamber dry clean

APPLEID MATERIALS INC7 citations71