Inventor
MERCIL RANDY W
US4 patents
Patents
4 patentsUS7229666B2Jun 12, 2007
Chemical vapor deposition method
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US6800172B2Oct 5, 2004
Interfacial structure for semiconductor substrate processing chambers and substrate transfer chambers and for semiconductor substrate processing chambers and accessory attachments, and semiconductor substrate processor
MICRON TECHNOLOGY INC30 citations91
US7468104B2Dec 23, 2008
Chemical vapor deposition apparatus and deposition method
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US7192487B2Mar 20, 2007
Semiconductor substrate processing chamber and accessory attachment interfacial structure
MICRON TECHNOLOGY INC3 citations61