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Inventor
YUM BONG-JIN
KR
2 patents
⚠️ This page may combine multiple inventors who share the name “YUM BONG-JIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LEE MOON-SANG
1 patent
US8117001B2
Feb 14, 2012
Measurement system for correcting overlay measurement error
LEE MOON-SANG
6 citations
81
SAMSUNG ELECTRONICS CO LTD
1 patent
US7908105B2
Mar 15, 2011
Measurement system for correcting overlay measurement error
SAMSUNG ELECTRONICS CO LTD
3 citations
60