Inventor

HAMBACH DIRK

DE2 patents

⚠️ This page may combine multiple inventors who share the name “HAMBACH DIRK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

DEGENHARDT RALF

1 patent

US8203119B2Jun 19, 2012

Charged particle beam device with retarding field analyzer

DEGENHARDT RALF28 citations85

LEICA MICROSYSTEM LITHOGRAPHY

1 patent

US6859516B2Feb 22, 2005

Method for examining structures on a semiconductor substrate

LEICA MICROSYSTEM LITHOGRAPHY28 citations85