Inventor
KURADA SATYA
US4 patents
Patents
4 patentsUS9310320B2Apr 12, 2016
Based sampling and binning for yield critical defects
KLA TENCOR CORP8 citations81
US9766187B2Sep 19, 2017
Repeater detection
KLA TENCOR CORP2 citations70
US9563943B2Feb 7, 2017
Based sampling and binning for yield critical defects
KLA TENCOR CORP1 citations49
US10620134B2Apr 14, 2020
Creating defect samples for array regions
KLA TENCOR CORP0 citations35