Inventor

TOKUSHIGE KEIZO

JP2 patents

Patents

2 patents

US5063294ANov 5, 1991

Converged ion beam apparatus

KOBE STEEL LTD95 citations94

US4918928AApr 24, 1990

Apparatus for testing IC devices at low temperature and cooling bag for use in testing IC devices at low temperature

KOBE STEEL LTD26 citations83