Inventor

FURUKAWA YUKITO

JP3 patents

Patents

3 patents

US5063294ANov 5, 1991

Converged ion beam apparatus

KOBE STEEL LTD95 citations94

US5280252AJan 18, 1994

Charged particle accelerator

KOBE STEEL LTD33 citations90

US5569919AOct 29, 1996

X-ray analytical apparatus

KOBE STEEL LTD1 citations46