Inventor
REVANKAR VITHAL
US12 patents
⚠️ This page may combine multiple inventors who share the name “REVANKAR VITHAL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
REVANKAR VITHAL
5 patentsUS8657958B2Feb 25, 2014
CVD-Siemens monosilane reactor process with complete utilization of feed gases and total recycle
REVANKAR VITHAL3 citations57
US8399072B2Mar 19, 2013
Process for improved chemcial vapor deposition of polysilicon
REVANKAR VITHAL3 citations57
US8993056B2Mar 31, 2015
Method of gas distribution and nozzle design in the improved chemical vapor deposition of polysilicon reactor
REVANKAR VITHAL1 citations47
US8124039B2Feb 28, 2012
Process of silicon tetrafluoride gas synthesis
REVANKAR VITHAL0 citations47
US7897125B1Mar 1, 2011
Silicon tetrafluoride byproduct separation process
REVANKAR VITHAL0 citations36
KULKARNI MILIND S
3 patentsUS8906313B2Dec 9, 2014
Fluidized bed reactor systems
KULKARNI MILIND S3 citations58
US8404206B2Mar 26, 2013
Methods for producing polycrystalline silicon that reduce the deposition of silicon on reactor walls
KULKARNI MILIND S2 citations58
US8728574B2May 20, 2014
Methods for introducing a first gas and a second gas into a reaction chamber
KULKARNI MILIND S1 citations48