Inventor
FREER ERIK M
US23 patents
⚠️ This page may combine multiple inventors who share the name “FREER ERIK M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FREER ERIK M
11 patentsUS8316866B2Nov 27, 2012
Method and apparatus for cleaning a semiconductor substrate
FREER ERIK M6 citations84
US8716210B2May 6, 2014
Material for cleaning a substrate
FREER ERIK M4 citations73
US8522801B2Sep 3, 2013
Method and apparatus for cleaning a semiconductor substrate
FREER ERIK M6 citations73
US8480810B2Jul 9, 2013
Method and apparatus for particle removal
FREER ERIK M5 citations73
US8475599B2Jul 2, 2013
Substrate preparation using stabilized fluid solutions and methods for making stable fluid solutions
FREER ERIK M6 citations73
US8522799B2Sep 3, 2013
Apparatus and system for cleaning a substrate
FREER ERIK M6 citations72
US8608859B2Dec 17, 2013
Method for removing contamination from a substrate and for making a cleaning solution
FREER ERIK M2 citations62
US8591662B2Nov 26, 2013
Methods for cleaning a semiconductor substrate
FREER ERIK M4 citations62
US8555903B2Oct 15, 2013
Method and apparatus for removing contamination from substrate
FREER ERIK M2 citations62
US8388762B2Mar 5, 2013
Substrate cleaning technique employing multi-phase solution
FREER ERIK M2 citations62
US8137474B2Mar 20, 2012
Cleaning compound and method and system for using the cleaning compound
FREER ERIK M4 citations62
LAM RES CORP
7 patentsUS7862662B2Jan 4, 2011
Method and material for cleaning a substrate
LAM RES CORP10 citations84
US7799141B2Sep 21, 2010
Method and system for using a two-phases substrate cleaning compound
LAM RES CORP8 citations84
US7737097B2Jun 15, 2010
Method for removing contamination from a substrate and for making a cleaning solution
LAM RES CORP11 citations84
US7696141B2Apr 13, 2010
Cleaning compound and method and system for using the cleaning compound
LAM RES CORP10 citations84
US7648584B2Jan 19, 2010
Method and apparatus for removing contamination from substrate
LAM RES CORP9 citations84
US7897213B2Mar 1, 2011
Methods for contained chemical surface treatment
LAM RES CORP0 citations52
US7975708B2Jul 12, 2011
Proximity head with angled vacuum conduit system, apparatus and method
LAM RES CORP0 citations42