Inventor

XI ZHAOHUI

CN2 patents

⚠️ This page may combine multiple inventors who share the name “XI ZHAOHUI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ADVANCED MICRO FAB EQUIP INC

1 patent

US9275870B2Mar 1, 2016

Plasma processing method and plasma processing device

ADVANCED MICRO FAB EQUIP INC7 citations81

YANG JAMES

1 patent

US9099284B2Aug 4, 2015

Method and system for autotuning of RF match

YANG JAMES3 citations57