Inventor

SMEETS DRIES

BE3 patents

⚠️ This page may combine multiple inventors who share the name “SMEETS DRIES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

2 patents

US9823576B2Nov 21, 2017

Radiation modulator for a lithography apparatus, a lithography apparatus, a method of modulating radiation for use in lithography, and a device manufacturing method

ASML NETHERLANDS BV0 citations46

US9715183B2Jul 25, 2017

Device, lithographic apparatus, method for guiding radiation and device manufacturing method

ASML NETHERLANDS BV0 citations45

ZEISS CARL SMT GMBH

1 patent

US10690812B2Jun 23, 2020

Optical element and optical system for EUV lithography, and method for treating such an optical element

ZEISS CARL SMT GMBH1 citations55