Inventor

ZHANG FENG-HONG

US2 patents

⚠️ This page may combine multiple inventors who share the name “ZHANG FENG-HONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

PROMOS TECHNOLOGIES PTE LTD

1 patent

US7829168B2Nov 9, 2010

Methods for inspecting and optionally reworking summed photolithography patterns resulting from plurally-overlaid patterning steps during mass production of semiconductor devices

PROMOS TECHNOLOGIES PTE LTD8 citations80

PROMOS TECHNOLOGIES

1 patent

US7241538B2Jul 10, 2007

Method for providing representative features for use in inspection of photolithography mask and for use in inspection photo-lithographically developed and/or patterned wafer layers, and products of same

PROMOS TECHNOLOGIES16 citations73