Inventor
DUBOUST ALAIN
US47 patents
⚠️ This page may combine multiple inventors who share the name “DUBOUST ALAIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
42 patentsUS6899804B2May 31, 2005
Electrolyte composition and treatment for electrolytic chemical mechanical polishing
APPLIED MATERIALS INC77 citations98
US6811680B2Nov 2, 2004
Planarization of substrates using electrochemical mechanical polishing
APPLIED MATERIALS INC102 citations98
US6776693B2Aug 17, 2004
Method and apparatus for face-up substrate polishing
APPLIED MATERIALS INC101 citations98
US6962524B2Nov 8, 2005
Conductive polishing article for electrochemical mechanical polishing
APPLIED MATERIALS INC80 citations97
US6773507B2Aug 10, 2004
Apparatus and method for fast-cycle atomic layer deposition
APPLIED MATERIALS INC124 citations97
US7422516B2Sep 9, 2008
Conductive polishing article for electrochemical mechanical polishing
APPLIED MATERIALS INC42 citations96
US6991528B2Jan 31, 2006
Conductive polishing article for electrochemical mechanical polishing
APPLIED MATERIALS INC45 citations96
US7059948B2Jun 13, 2006
Articles for polishing semiconductor substrates
APPLIED MATERIALS INC25 citations93
US6979248B2Dec 27, 2005
Conductive polishing article for electrochemical mechanical polishing
APPLIED MATERIALS INC42 citations93
US7323416B2Jan 29, 2008
Method and composition for polishing a substrate
APPLIED MATERIALS INC20 citations92
US7285036B2Oct 23, 2007
Pad assembly for electrochemical mechanical polishing
APPLIED MATERIALS INC18 citations92
US7278911B2Oct 9, 2007
Conductive polishing article for electrochemical mechanical polishing
APPLIED MATERIALS INC33 citations92
US7229535B2Jun 12, 2007
Hydrogen bubble reduction on the cathode using double-cell designs
APPLIED MATERIALS INC25 citations92
US7160432B2Jan 9, 2007
Method and composition for polishing a substrate
APPLIED MATERIALS INC21 citations92
US7128825B2Oct 31, 2006
Method and composition for polishing a substrate
APPLIED MATERIALS INC20 citations92
US7066800B2Jun 27, 2006
Conductive polishing article for electrochemical mechanical polishing
APPLIED MATERIALS INC31 citations92
US7029365B2Apr 18, 2006
Pad assembly for electrochemical mechanical processing
APPLIED MATERIALS INC29 citations92
US6988942B2Jan 24, 2006
Conductive polishing article for electrochemical mechanical polishing
APPLIED MATERIALS INC41 citations92
US6841057B2Jan 11, 2005
Method and apparatus for substrate polishing
APPLIED MATERIALS INC21 citations92
US6837983B2Jan 4, 2005
Endpoint detection for electro chemical mechanical polishing and electropolishing processes
APPLIED MATERIALS INC32 citations92
US7790015B2Sep 7, 2010
Endpoint for electroprocessing
APPLIED MATERIALS INC8 citations84
US7655565B2Feb 2, 2010
Electroprocessing profile control
APPLIED MATERIALS INC8 citations84
US7608173B2Oct 27, 2009
Biased retaining ring
APPLIED MATERIALS INC12 citations84
US7232514B2Jun 19, 2007
Method and composition for polishing a substrate
APPLIED MATERIALS INC15 citations84
US7207878B2Apr 24, 2007
Conductive polishing article for electrochemical mechanical polishing
APPLIED MATERIALS INC11 citations84
US7137868B2Nov 21, 2006
Pad assembly for electrochemical mechanical processing
APPLIED MATERIALS INC12 citations84
US6991526B2Jan 31, 2006
Control of removal profile in electrochemically assisted CMP
APPLIED MATERIALS INC14 citations84
US7520795B2Apr 21, 2009
Grooved retaining ring
APPLIED MATERIALS INC8 citations81
US7276743B2Oct 2, 2007
Retaining ring with conductive portion
APPLIED MATERIALS INC11 citations81
US7137879B2Nov 21, 2006
Conductive polishing article for electrochemical mechanical polishing
APPLIED MATERIALS INC7 citations74
US6977036B2Dec 20, 2005
Method and apparatus for substrate polishing
APPLIED MATERIALS INC6 citations74
US7628905B2Dec 8, 2009
Algorithm for real-time process control of electro-polishing
APPLIED MATERIALS INC2 citations63
US7303462B2Dec 4, 2007
Edge bead removal by an electro polishing process
APPLIED MATERIALS INC5 citations63
US7112270B2Sep 26, 2006
Algorithm for real-time process control of electro-polishing
APPLIED MATERIALS INC3 citations63
US7709382B2May 4, 2010
Electroprocessing profile control
APPLIED MATERIALS INC2 citations62
US10589397B2Mar 17, 2020
Endpoint control of multiple substrate zones of varying thickness in chemical mechanical polishing
APPLIED MATERIALS INC1 citations61
US7390429B2Jun 24, 2008
Method and composition for electrochemical mechanical polishing processing
APPLIED MATERIALS INC3 citations61
US7344432B2Mar 18, 2008
Conductive pad with ion exchange membrane for electrochemical mechanical polishing
APPLIED MATERIALS INC3 citations60
US10103288B2Oct 16, 2018
Transfer chamber metrology for improved device yield
APPLIED MATERIALS INC0 citations52
US7842169B2Nov 30, 2010
Method and apparatus for local polishing control
APPLIED MATERIALS INC0 citations52
US7678245B2Mar 16, 2010
Method and apparatus for electrochemical mechanical processing
APPLIED MATERIALS INC0 citations52
US7311592B2Dec 25, 2007
Conductive polishing article for electrochemical mechanical polishing
APPLIED MATERIALS INC1 citations52