Inventor
MORI GLEN
US8 patents
Patents
8 patentsUS6001227ADec 14, 1999
Target for use in magnetron sputtering of aluminum for forming metallization films having low defect densities and methods for manufacturing and using such target
APPLIED MATERIALS INC40 citations96
US6228186B1May 8, 2001
Method for manufacturing metal sputtering target for use in DC magnetron so that target has reduced number of conduction anomalies
APPLIED MATERIALS INC23 citations92
US6171455B1Jan 9, 2001
Target for use in magnetron sputtering of aluminum for forming metallization films having low defect densities and methods for manufacturing and using such target
APPLIED MATERIALS INC15 citations92
US9425076B2Aug 23, 2016
Substrate transfer robot end effector
APPLIED MATERIALS INC14 citations82
US6126791AOct 3, 2000
Target for use in magnetron sputtering of aluminum for forming metallization films having low defect densities and methods for manufacturing and using such target
APPLIED MATERIALS INC12 citations82
US10431489B2Oct 1, 2019
Substrate support apparatus having reduced substrate particle generation
APPLIED MATERIALS INC3 citations72
US10312127B2Jun 4, 2019
Compliant robot blade for defect reduction
APPLIED MATERIALS INC2 citations70
US11348823B2May 31, 2022
Compliant robot blade for substrate support and transfer
APPLIED MATERIALS INC0 citations59