Inventor

MOERITZ MIKE

DE2 patents

⚠️ This page may combine multiple inventors who share the name “MOERITZ MIKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HERGENHAN GUIDO

1 patent

US8154000B2Apr 10, 2012

Arrangement for the continuous generation of liquid tin as emitter material in EUV radiation sources

HERGENHAN GUIDO13 citations71

XTREME TECH GMBH

1 patent

US7812542B2Oct 12, 2010

Arrangement and method for the generation of extreme ultraviolet radiation by means of an electrically operated gas discharge

XTREME TECH GMBH3 citations59