Inventor
KAWAMURA TETSUFUMI
JP23 patents
⚠️ This page may combine multiple inventors who share the name “KAWAMURA TETSUFUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
11 patentsUS7977675B2Jul 12, 2011
Semiconductor device and method for manufacturing the same
HITACHI LTD77 citations98
US8368067B2Feb 5, 2013
Oxide semiconductor device with oxide semiconductor layers of different oxygen concentrations and method of manufacturing the same
HITACHI LTD34 citations92
US7968368B2Jun 28, 2011
Method of manufacturing a field effect transistor having an oxide semiconductor
HITACHI LTD4 citations63
US10203688B2Feb 12, 2019
Manufacturing device, system and method for outputting a manufacturing process flow having the shortest total process time among a plurality of manufacturing process flows
HITACHI LTD1 citations62
US11156650B2Oct 26, 2021
State detecting system and state detecting method
HITACHI LTD0 citations61
US10605824B2Mar 31, 2020
MEMS manufacturing method and MEMS manufacturing apparatus
HITACHI LTD0 citations52
US10410826B2Sep 10, 2019
Device processing method and device processing apparatus
HITACHI LTD0 citations52
US8377742B2Feb 19, 2013
Thin film transistor and method for manufacturing the same
HITACHI LTD0 citations52
US10002801B2Jun 19, 2018
Device manufacturing method and device manufacturing apparatus
HITACHI LTD0 citations51
US12411547B2Sep 9, 2025
Pressure sensor device, method for manufacturing the same, and work management system using the same
HITACHI LTD0 citations47
US10336609B2Jul 2, 2019
Microstructure processing method and microstructure processing apparatus
HITACHI LTD0 citations40
KAWAMURA TETSUFUMI
5 patentsUS8314032B2Nov 20, 2012
Semiconductor device and method for manufacturing the same
KAWAMURA TETSUFUMI45 citations93
US8629451B2Jan 14, 2014
Display device
KAWAMURA TETSUFUMI14 citations92
US8242505B2Aug 14, 2012
Display device
KAWAMURA TETSUFUMI14 citations92
US8653517B2Feb 18, 2014
Thin-film transistor and method for manufacturing the same
KAWAMURA TETSUFUMI3 citations62
US8139173B2Mar 20, 2012
Liquid crystal display
KAWAMURA TETSUFUMI2 citations62