Inventor

HIRABAYASHI YOSHINAO

JP2 patents

⚠️ This page may combine multiple inventors who share the name “HIRABAYASHI YOSHINAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EBARA CORP

1 patent

US7592586B2Sep 22, 2009

Mapping-projection-type electron beam apparatus for inspecting sample by using electrons reflected from the sample

EBARA CORP5 citations72

WATANABE KENJI

1 patent

US8124933B2Feb 28, 2012

Mapping-projection-type electron beam apparatus for inspecting sample by using electrons emitted from the sample

WATANABE KENJI0 citations48