Inventor

YU KEVEN

US2 patents

⚠️ This page may combine multiple inventors who share the name “YU KEVEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

1 patent

US9159574B2Oct 13, 2015

Method of silicon etch for trench sidewall smoothing

APPLIED MATERIALS INC3 citations56

YU KEVEN

1 patent

US8778574B2Jul 15, 2014

Method for etching EUV material layers utilized to form a photomask

YU KEVEN0 citations41