Inventor

RABA ANDREAS

DE3 patents

Patents

3 patents

US12313978B2May 27, 2025

Optical assembly, projection exposure apparatus and method

ZEISS CARL SMT GMBH0 citations58

US12372877B2Jul 29, 2025

Projection exposure apparatus for semiconductor lithography

ZEISS CARL SMT GMBH0 citations54

US12443110B2Oct 14, 2025

Optical assembly, method for controlling an optical assembly, and projection exposure apparatus

ZEISS CARL SMT GMBH0 citations48