Inventor
HOSAKA HAYATO
JP4 patents
Patents
4 patentsUS11059145B2Jul 13, 2021
Dressing apparatus and dressing method for substrate rear surface polishing member
TOKYO ELECTRON LTD2 citations69
US10840079B2Nov 17, 2020
Substrate processing apparatus, substrate processing method and storage medium
TOKYO ELECTRON LTD2 citations68
US11532487B2Dec 20, 2022
Substrate processing apparatus
TOKYO ELECTRON LTD0 citations60
US12491600B2Dec 9, 2025
Substrate warpage correction method, computer storage medium, and substrate warpage correction apparatus
TOKYO ELECTRON LTD0 citations47