Inventor
MOTIKA STEPHEN ANDREW
US10 patents
Patents
10 patentsUS7357138B2Apr 15, 2008
Method for etching high dielectric constant materials and for cleaning deposition chambers for high dielectric constant materials
AIR PROD & CHEM559 citations98
US7055263B2Jun 6, 2006
Method for cleaning deposition chambers for high dielectric constant materials
AIR PROD & CHEM385 citations98
US5817597AOct 6, 1998
Compositions capable of operating under high oxygen partial pressures for use in solid-state oxygen producing devices
AIR PROD & CHEM52 citations95
US5712220AJan 27, 1998
Coompositions capable of operating under high carbon dioxide partial pressures for use in solid-state oxygen producing devices
AIR PROD & CHEM72 citations94
US7285154B2Oct 23, 2007
Xenon recovery system
AIR PROD & CHEM42 citations92
US7122072B2Oct 17, 2006
Controlled heating and cooling of mixed conducting metal oxide materials
AIR PROD & CHEM26 citations92
US6056807AMay 2, 2000
Fluid separation devices capable of operating under high carbon dioxide partial pressures which utilize creep-resistant solid-state membranes formed from a mixed conducting multicomponent metallic oxide
AIR PROD & CHEM52 citations91
US7119032B2Oct 10, 2006
Method to protect internal components of semiconductor processing equipment using layered superlattice materials
AIR PROD & CHEM14 citations84
US7581549B2Sep 1, 2009
Method for removing carbon-containing residues from a substrate
AIR PROD & CHEM18 citations83
US8372756B2Feb 12, 2013
Selective etching of silicon dioxide compositions
AIR PROD & CHEM2 citations59