Inventor

AIKAWA CHIKARA

JP3 patents

⚠️ This page may combine multiple inventors who share the name “AIKAWA CHIKARA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

DISCO CORP

2 patents

US10276413B2Apr 30, 2019

Laser processing apparatus

DISCO CORP1 citations59

US9054179B2Jun 9, 2015

Wafer processing method

DISCO CORP1 citations49

AIKAWA CHIKARA

1 patent

US8642920B2Feb 4, 2014

Wafer dividing apparatus and laser processing apparatus

AIKAWA CHIKARA2 citations51