Inventor
METZ MATTHIAS
US12 patents
⚠️ This page may combine multiple inventors who share the name “METZ MATTHIAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BOSCH GMBH ROBERT
9 patentsUS7449355B2Nov 11, 2008
Anti-stiction technique for electromechanical systems and electromechanical device employing same
BOSCH GMBH ROBERT57 citations97
US8020266B2Sep 20, 2011
Method of producing a device
BOSCH GMBH ROBERT23 citations92
US7757555B2Jul 20, 2010
Tri-axis accelerometer having a single proof mass and fully differential output signals
BOSCH GMBH ROBERT14 citations92
US7414351B2Aug 19, 2008
Energy harvesting device manufactured by print forming processes
BOSCH GMBH ROBERT26 citations92
US7671515B2Mar 2, 2010
Microelectromechanical devices and fabrication methods
BOSCH GMBH ROBERT13 citations83
US7582514B2Sep 1, 2009
Microelectromechanical systems encapsulation process with anti-stiction coating
BOSCH GMBH ROBERT9 citations82
US7898046B2Mar 1, 2011
Microelectromechanical systems encapsulation process
BOSCH GMBH ROBERT5 citations73
US7625773B2Dec 1, 2009
Anti-stiction technique for electromechanical systems and electromechanical device employing same
BOSCH GMBH ROBERT7 citations73
US7563633B2Jul 21, 2009
Microelectromechanical systems encapsulation process
BOSCH GMBH ROBERT5 citations73